Werner, M, van den Berg, JA, Armour, DG, Carter, G, Feudel, T, Herden, M, Bersani, M, Giubertoni, D, Ottaviano, L, Bongiorno, C, Mannino, G, Bailey, P, Noakes, TCQ, "Shallow BF2 implants in Xe-bombardment-preamorphized Si: the interaction between Xe and F", Applied Physics Letters, 2005