The effect of oxygen on the properties of pulsed d.c magnetron sputtered In2O3 films
(2010)
Presentation / Conference
Karthikeyan, S., Hill, A., & Pilkington, R. (2010, November). The effect of oxygen on the properties of pulsed d.c magnetron sputtered In2O3 films. Presented at 1st CSE Doctoral School Postgraduate Research Conference, University of Salford, Salford
Thin films that have high transparency and conductivity are used in various applications such as displays, solar cells, electrochromic devices and heatable glasses (Granqvist and Hultåker, 2002;1-5). This present work describes the deposition of tra... Read More about The effect of oxygen on the properties of pulsed d.c magnetron sputtered In2O3 films.