Growth of thin films of molybdenum and tungsten oxides by combustion CVD using aqueous precursor solutions
(2004)
Journal Article
Davis, M., Benito, G., Sheel, D., & Pemble, M. (2004). Growth of thin films of molybdenum and tungsten oxides by combustion CVD using aqueous precursor solutions. Chemical Vapor Deposition, 10(1), 29-34. https://doi.org/10.1002/cvde.200306260
Using combustion chemical vapour deposition, layers of molybdenum and tungsten oxides have been deposited on glass and silicon at low temperatures. Inexpensive ammonium salts of molybdate and metatungstate ions were used as precursors and were delive... Read More about Growth of thin films of molybdenum and tungsten oxides by combustion CVD using aqueous precursor solutions.