The influence of operating parameters on pulsed D.C. magnetron sputtering plasma

Karthikeyan, S; Hill, AE; Cowpe, JS; Pilkington, RD

Abstract

This paper describes the breakdown voltage characteristics in a pulsed D.C. magnetron sputtering system under varying conditions of frequency, current and pulse-off time. The behaviour of the breakdown voltage with pulsing frequency at different pressures and constant pulse-off time was recorded and revealed that the breakdown voltage decreased consistently as the frequency increased up to 70 kHz. Above this frequency, perturbation in the breakdown voltage was noted, possibly due to the rise in pre-breakdown current during the few microseconds of pulse-on time. This perturbation effect was no longer observed when the operating current was increased. The breakdown voltage was seen to decrease when the pulse-off time was increased while keeping the total period of the pulse constant.

Citation

Karthikeyan, S., Hill, A., Cowpe, J., & Pilkington, R. (2010). The influence of operating parameters on pulsed D.C. magnetron sputtering plasma. Vacuum, 85(5), 634-638. https://doi.org/10.1016/j.vacuum.2010.09.007

• Journal Article Type: Article
• Publication Date: Nov 9, 2010
• Deposit Date: Dec 20, 2010
• Journal: Vacuum
• Print ISSN: 0042-207X
• Publisher: Elsevier
• Peer Reviewed: Peer Reviewed
• Volume: 85
• Issue: 5
• Pages: 634-638
• DOI: https://doi.org/10.1016/j.vacuum.2010.09.007
• Publisher URL: http://dx.doi.org/10.1016/j.vacuum.2010.09.007