The growth of thermochromic VO2 films on glass by atmospheric-pressue CVD: a comparative study of precursors CVD methodology and substrates

Vernardou, D; Pemble, ME; Sheel, DW

Abstract

This paper briefly reviews previous work on the growth of thermochromic VO2 thin films on glass, and then examines and compares three different CVD approaches and two precursor systems for the production of these materials. It is found that atmospheric pressure (AP) CVD using vanadium(IV) chloride (VCl4) and H2O on commercial SiO2-precoated glass yields the smoothest films, with transition temperature (Tc) values of around 58 °C, while APCVD using vanadyl(IV) acetyl acetonate (VO(acac)2) on the same substrates produces slightly rougher films, which are more crystalline and possess a Tc with a value as low as 51.5 °C. Films grown using VO(acac)2 in a direct liquid-injection metal-organic (DLI-MO) CVD reactor exhibited considerably poorer thermochromic and morphological properties as compared with those grown by APCVD. These findings are discussed in terms of possible variations in growth mechanisms occurring during the three processes studied.

Citation

Vernardou, D., Pemble, M., & Sheel, D. (2006). The growth of thermochromic VO2 films on glass by atmospheric-pressue CVD: a comparative study of precursors CVD methodology and substrates. Chemical Vapor Deposition, 12(5), 263-274. https://doi.org/10.1002/cvde.200506419

• Journal Article Type: Article
• Publication Date: May 1, 2006
• Deposit Date: Sep 3, 2007
• Journal: Chemical Vapor Deposition
• Print ISSN: 0948-1907
• Publisher: Wiley-VCH Verlag
• Peer Reviewed: Peer Reviewed
• Volume: 12
• Issue: 5
• Pages: 263-274
• DOI: https://doi.org/10.1002/cvde.200506419
• Keywords: Atmospheric pressure CVD, thermochromic materials, vanadium oxide, APCVD, thermochromic properties, vanadium chloride, vanadyl acetyl acetonate
• Publisher URL: http://dx.doi.org/10.1002/cvde.200506419