Investigation of space charge neutralization effects in high-current positive ion beams
(2008)
Thesis
Fiala, J. Investigation of space charge neutralization effects in high-current positive ion beams. (Thesis)
Through the experience gained during the industrial development of low energy implanters, it is commonly believed that improvements in forced space-charge neutralization are responsible for the maintenance of high currents down to an energy of abo... Read More about Investigation of space charge neutralization effects in high-current positive ion beams.