Investigation of space charge neutralization effects in high-current positive ion beams
(2008)
Thesis
Fiala, J. Investigation of space charge neutralization effects in high-current positive ion beams. (Thesis)
Through the experience gained during the industrial development of low energy implanters,
it is commonly believed that improvements in forced space-charge neutralization
are responsible for the maintenance of high currents down to an energy
of abo...
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