Skip to main content

Research Repository

Advanced Search

All Outputs (1)

Investigation of space charge neutralization effects in high-current positive ion beams (2008)
Thesis
Fiala, J. Investigation of space charge neutralization effects in high-current positive ion beams. (Thesis)

Through the experience gained during the industrial development of low energy implanters,
it is commonly believed that improvements in forced space-charge neutralization
are responsible for the maintenance of high currents down to an energy
of abo... Read More about Investigation of space charge neutralization effects in high-current positive ion beams.