Finite element modelling of stress development during deposition of ion assisted coatings
(2002)
Journal Article
Ward, D., & Arnell, R. (2002). Finite element modelling of stress development during deposition of ion assisted coatings. Thin Solid Films, 420-42, 269-274. https://doi.org/10.1016/S0040-6090%2802%2900934-3
Ion assisted physical vapour deposited (IAPVD) films typically have a high state of residual stress. This residual stress comprises two components: a thermal stress, which forms as the system cools to room temperature; and an intrinsic stress which i... Read More about Finite element modelling of stress development during deposition of ion assisted coatings.