Near-field measurement of amplitude and phase in silicon waveguides with liquid cladding

Ayache, M.; Nezhad, M.P.; Zamek, S.; Abashin, M.; Fainman, Y.

Abstract

This work demonstrates a technique that allows optical near-field characterization of devices while preserving their optical properties. To do so, a liquid overcladding is introduced to emulate the actual overcladding of the final operational device while allowing the probe to sample the evanescent field at the core cladding interface for analysis by the near-field scanning optical microscopy (NSOM). This technique enables metrology on the actual rather than duplicate device and preserves the dispersion of the optical structures to replicate the designed structure. To our best knowledge this is the only H-NSOM technique allowing characterization of photonic circuits in their final form.

• Presentation Conference Type: Conference Paper (published)
• Conference Name: IEEE Winter Topicals 2011
• Start Date: Jan 10, 2011
• End Date: Jan 12, 2011
• Online Publication Date: Mar 14, 2011
• Publication Date: Mar 14, 2011
• Deposit Date: Aug 21, 2024
• Publisher: Institute of Electrical and Electronics Engineers
• Pages: 95-96
• Book Title: IEEE Winter Topicals 2011
• ISBN: 978-1-4244-8428-7
• DOI: https://doi.org/10.1109/PHOTWTM.2011.5730064