Fabrication approaches for metallo-dielectric plasmonic waveguides

Nezhad, M.P.; Zamek, S.; Pang, L.; Fainman, Y.

Abstract

Different techniques for fabricating long-range plasmonic metallo-dielectric waveguides are discussed. The approaches depend strongly on the material system in use. Specific results are presented for SU8 and PDMS.

• Presentation Conference Type: Conference Paper (published)
• Conference Name: MOEMS-MEMS 2008 Micro and Nanofabrication
• Start Date: Jan 19, 2008
• End Date: Jan 24, 2008
• Publication Date: Feb 7, 2008
• Deposit Date: Aug 21, 2024
• Publisher: Society of Photo-optical Instrumentation Engineers
• Volume: 6883
• Book Title: Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
• DOI: https://doi.org/10.1117/12.768161