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Form birefringent retardation plates in GaAs substrates: Design, fabrication, and characterization

Nezhad, M.P.; Tsai, C.; Pang, L.; Nakagawa, W.; Klemens, G.; Fainman, Y.

Authors

C. Tsai

L. Pang

W. Nakagawa

G. Klemens

Y. Fainman



Contributors

C. Tsai
Other

L. Pang
Other

W. Nakagawa
Other

G. Klemens
Other

Y. Fainman
Other

Abstract

We discuss various practical points in the design, fabrication and characterization of form birefringent retardation plates in GaAs. The role of the substrate in the device performance is presented, together with the importance of using anti-reflection coatings. Also, we discuss the specific case of metallic reflection gratings in GaAs substrates and the resulting enhanced retardation. Finally we present the results of thermal tuning of a nominally half-wave subwavelength retardation plate.

Presentation Conference Type Conference Paper (unpublished)
Conference Name Optical Science and Technology, SPIE's 48th Annual Meeting
Start Date Aug 3, 2003
End Date Aug 8, 2003
Publication Date Oct 20, 2003
Deposit Date Aug 21, 2024
Journal Proceedings of SPIE - The International Society for Optical Engineering
Publisher Society of Photo-optical Instrumentation Engineers
Volume 5225
Pages 69-77
Book Title Proceedings, Nano- and Micro-Optics for Information Systems
DOI https://doi.org/10.1117/12.506672