Advanced coatings through pulsed magnetron sputtering
(2004)
Journal Article
Kelly, P., Hisek, J., Zhou, Y., Pilkington, R., & Arnell, R. (2004). Advanced coatings through pulsed magnetron sputtering. Surface Engineering, 20(3), 157-162. https://doi.org/10.1179/026708404225010702
Pulsed magnetron sputtering (PMS) has become established as the process of choice for the deposition of dielectric materials for many applications. The process is attractive because it offers stable arc free operating conditions during the deposi... Read More about Advanced coatings through pulsed magnetron sputtering.