The deposition of low temperature sputtered In2O3 films using pulsed d.c. magnetron sputtering from a powder target
(2013)
Journal Article
Karthikeyan, S., Hill, A., & Pilkington, R. (2014). The deposition of low temperature sputtered In2O3 films using pulsed d.c. magnetron sputtering from a powder target. Thin Solid Films, 550, 140-144. https://doi.org/10.1016/j.tsf.2013.10.141
Transparent conductive oxide layers are widely used in various applications such as solar cells, touch screen displays, heatable glasses, etc. This present work describes the deposition of transparent and conducting In2O3 films from In2O3 powdered ta... Read More about The deposition of low temperature sputtered In2O3 films using pulsed d.c. magnetron sputtering from a powder target.