Atmospheric pressure glow discharge plasma enhanced chemical vapour deposition of titania and aluminium based thin films
(2009)
Thesis
Hodgkinson, J. Atmospheric pressure glow discharge plasma enhanced chemical vapour deposition of titania and aluminium based thin films. (Thesis). Salford : University of Salford
Atmospheric pressure glow discharge (APGD) plasma CVD was used to deposit thin films of titania at 200 °C using two different precursors. The resulting films were characterised using techniques including XPS, RBS and XRD. It was established that... Read More about Atmospheric pressure glow discharge plasma enhanced chemical vapour deposition of titania and aluminium based thin films.