CO2 laser micromachining of nanocrystalline diamond films grown on doped silicon substrates
(2016)
Journal Article
Richter, J., Abdou, A., Williams, O., Witzens, J., & Nezhad, M. (2016). CO2 laser micromachining of nanocrystalline diamond films grown on doped silicon substrates. Optical Materials Express, 6, 3916-3926. https://doi.org/10.1364/OME.6.003916
We demonstrate that nanocrystalline diamond films grown on highly doped silicon substrates can be patterned using a CO2 laser operating at a wavelength of 10.6 μm, where both low doped silicon and diamond exhibit negligible optical absorption. The pa... Read More about CO2 laser micromachining of nanocrystalline diamond films grown on doped silicon substrates.