Understanding nanomechanical and surface ellipsometry of optical F-doped SnO2 thin films by in-line APCVD
(2020)
Journal Article
Afzaal, M., Yates, H., Al-Ahmed, A., Ul-Hamid, A., Salhi, B., & Ali, M. (2020). Understanding nanomechanical and surface ellipsometry of optical F-doped SnO2 thin films by in-line APCVD. Applied Physics A, 126, 840. https://doi.org/10.1007/s00339-020-04033-z
In this paper, a production-type chemical vapour deposition (CVD) is utilized to deposit fluorine doped tin oxide thin films of different thicknesses and dopant levels. Deposited films showed a preferred orientation along the (200) plane of a tetra... Read More about Understanding nanomechanical and surface ellipsometry of optical F-doped SnO2 thin films by in-line APCVD.