The influence of operating parameters on pulsed D.C. magnetron sputtering plasma
(2010)
Journal Article
Karthikeyan, S., Hill, A., Cowpe, J., & Pilkington, R. (2010). The influence of operating parameters on pulsed D.C. magnetron sputtering plasma. Vacuum, 85(5), 634-638. https://doi.org/10.1016/j.vacuum.2010.09.007
This paper describes the breakdown voltage characteristics in a pulsed D.C. magnetron sputtering system under varying conditions of frequency, current and pulse-off time. The behaviour of the breakdown voltage with pulsing frequency at different pres... Read More about The influence of operating parameters on pulsed D.C. magnetron sputtering plasma.