Integrated Nanophotonic Control of Thermal Bimorph Microactuators
(2024)
Presentation / Conference Contribution
A new type of thermal bimorph microactuator is presented, in which energy delivery to the actuator is achieved through an integrated nanophotonics approach. This approach has been adopted from existing photonic device and optical communications techn... Read More about Integrated Nanophotonic Control of Thermal Bimorph Microactuators.